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This volume provides a comprehensive state-of-the art assessment of the fundamentals of the Microscale heat transfer and transport phenomena and heat transfer and applications in Microsystems. The modern trend toward miniaturization of devices requires a better understanding of heat mass transfer phenomena in small dimensions. Devices having dimensions of order of microns are being developed for use of cooling of integrated circuits, and in biochemicals-biomedical applications and cryogenics. Microelectromechanical systems (MEMS) have an important impact in medicine, bioengineering, information technologies and other industries.