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The 16 th International Symposium on MEMS and Nanotechnology , Volume 5 of the Proceedings of the 2015SEM Annual Conference& Exposition on Experimental and Applied Mechanics , the fifth volume of nine from the Conference, brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on a wide range of areas, including:§§Microscale and Microstructural Effects on Mechanical Behavior§§Dynamic Micro/Nanomechanics§§In-situ Techniques§§Mechanics of Graphene§§Indentation and Small Scale Testing§§MEMS§