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This book covers both experimental and theoretical aspects of nanoscale light scattering and surface roughness. Topics include: spherical particles located on a substrate; surface and buried interface roughness; surface roughness of polymer thin films; magnetic and thermal fluctuations at planar surfaces; speckle patterns; scattering of electromagnetic waves from a metal; multiple wavelength light scattering; nanoroughness standards.This volume presents up-to-date surveys of many aspects of rough surface scattering that are relevant to the scattering of electromagnetic waves from surfaces with nanoscale roughness. Both the direct and inverse scattering problems are considered, perturbative and computational approaches to their solution are described, and experimental methods and results are discussed.