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Global Modeling and Peripheral Plasma
An Improved Global Model for Electronegative Discharge and Ignition Conditions for Peripheral Plasma Connected to a Capacitive Discharge
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In the first part of this book, an improved volume-§averaged global model is developed for a cylindrical §electronegative plasma that is applicable over a wide §range of electron densities, electronegativities, and §pressures. It is applied to steady and pulsed-power §oxygen discharges. The model incorporates effective §volume and surface loss factors for ions and §electrons combining three EN discharge regimes §spanning the plasma parameters and gas pressures of §interest.§The second part explores both theoretically and §experimentally a capacitive discharge connected §through a dielectric or metal slot to a peripheral §grounded region, which is used in commercial dual §frequency capacitive discharges. Ignition of the §peripheral plasma produces effects that are §detrimental to processing performance. Discharge §models are developed for diffusion and plasma §maintenance in the slot, and plasma maintenance in §the periphery. The theoretical predictions of §ignition conditions are compared with experimental §results. Instabilities associated with the loss of §confinement are discovered, and a physical model is §proposed.
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