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Fabrication and Design of Resonant Microdevices
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This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices - important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
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