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This book constitutes the refereed proceedings of the 5th International Workshop on Systems, Architectures, Modeling, and Simulation, SAMOS 2005, held in Samos, Greece in July 2005.§The 49 revised full papers presented were thoroughly reviewed and selected from 114 submissions. The papers are organized in topical sections on reconfigurable system design and implementations, processor architectures, design and simulation, architectures and implementations, system level design, and modeling and simulation.